Abstract: The computational model and a finite element algorithm for high temperature thermal contact resistance analysis are established, based on the multipoint contact theory, and the basic parameters of the computational model can be derived from the characteristic sizes of surface toughness measurements. The present model can simulate the effects of interface toughness, interface pressure, interface temperature and the property of interstitial materials to the thermal contact resistance, with the consideration of temperature-dependent thermal conductivity under high temperature and the radiation heat transfer effects in the interface gap. Numerical results show that: the present finite element model and computational method can simulate the thermal contact resistance under different conditions, and it is a new approach to high temperature thermal contact resistance research.